Four-Point-Probes
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Jandel Engineering Manual Four Point Probing Equipment
Scroll down this column to view a wide range of sheet resistance and resistivity measurement equipment.
A complete Jandel Engineering resistivity measurement system consists of a four point probe measurement ELECTRONICS unit combined with a four point PROBE unit. Complete systems are listed directly below as 
A, B, C, and D. The individual components such as the probe units and the electronics units follow.
System Configurations:
A Jandel Wafer Four Point Probing System
Multipositon Wafer Probe combined with RM3-AR Test Unit
B Jandel General Purpose Four Point Probing System
Multi Height Probe combined with RM3-AR Test Unit
C Jandel Multi Purpose Four Point Probing System
Multi Height Microposition Probe combined with RM3-AR Test Unit
D Jandel Portable Four Point Probing System
Hand Applied Probe combined with the HM21 Hand Held Meter
E Jandel Portable Four Point Probing System for measuring potscrap, silicon tops and tails, ingots.
Individual 4PP Components:
1 RM3-AR Test Unit w/PC Software
Combined current source and meter in one unit. Measure from 1 milliohm-per-square up to 5 x 108 ohms-per-square
1A RM3-AR Operating Manual with software description [700K PDF file]
PC software is INCLUDED with the RM3-AR Test Unit
1B Resistor Plug for external verification of RM3-AR Test Unit
2 Multiposition Wafer Probe
Manually probe 1 to 9 pre-set locations on wafers up to 8" in diameter with 1mm repeatability.
3 Multi-Height 4 Point Probe
Easily adjusts for probing materials of varying dimensions such as large substrates, ingots, wafers, etc..
4 Microposition Probe
Ideal for sample up to 76mm (3") diameter requiring high probe placement accuracy.
5 Multi Height Microposition Probe
Removeable X-Y stage to provide both sample size versatility and high tip placement accuracy
6 Universal Probe
Versatile research unit for wafers and substrates up to 76mm (3") in diameter
7 Hand Applied 4 Point Probe
Manually probe large flat panels, ingots, etc.
7A Using the Hand Applied Probe on small samples
7B Identifying the various parts of the Hand Applied Probe
8 HM21 Hand Held Meter
Hand held four point probe souce-meter with optional probe.
8A Software for the HM21 Meter
PC software is INCLUDED with the HM21.
8B Resistor Plug for external verification of HM20 Hand Held Meter
Jandel
Four Point Probe Heads for All Known Systems
9 Probes for Prometrix, KLA/Tencor, & CDE
Probe heads for Prometrix, KLA/Tencor, and CDE systems. Full range of specs available including close space probes (20 mil spacing).
9A Prometrix/KLA-Tencor Probe Heads[53K PDF file]
9B CDE (Creative Device Engineering) Probe Heads [128K PFD file]
10 Probes for ALL other systems
High quality probe heads for all known systems. Jeweled Needle Guides, Rebuildable to "as new" condition, Unsurpassed quality.
10A Jandel Cylindrical Probe Head
10A-1 Cylindrical Probe brochure [257K PDF file]
10A-2 Application Notes regarding Cylindrical Probe [149K PDF file]
10A-3 Mounting Cylindrical Probe on alternate apparatus [91K PDF file
10B Jandel Four Pin Probe Head
10C Jandel Cartridge with Lead Probe Head
10D Jandel Compact Probe Head
10E Jandel Miniature Cartridge Probe Head
10F Jandel Miniature Cartridge with 6-32 tapped holes Probe Head
10G Jandel Probe Head Light Shrouds
10H Jandel P-N Typing Unit
10I Jandel ITO Reference Sample
Specialty Four Point Probe Heads
11 High/Low Temperature 4 Pt Probes
12 Vacuum Chamber 4 Pt Probes
13 Square Array (Hall) 4 Pt Probes
14 Unusual FIVE Point Probes
15 Close Needle Spacing Probes
Ecopia HMS Hall Measurement System
16 The Ecopia HMS Hall Measurement System is a complete system for measuring the resistivity, carrier concentration, and mobility of semiconductors.
SRM-232 Sheet Resistance Meter
Four Measurement Ranges
17 Low Cost Four Point Probe with Meter
17A SRM Probe Head Information
Signatone
Manual Four Point Probe with Computer Controlled Data Acquisition System
Manual Four Point Probe
Computer Controlled Data Acquisition
Fully Featured Windows Software
18 Pro4 Manual Four Point Probe with Computer Control Data Acquisition
Signatone
Thin Film Resistivity Wafer Mapping System
for wafers up to 300 mm
Auto Stepping
Available with Cassette-to-Cassette
Fully Featured Windows Software
Signatone Reliability & Quality
19 Thin Film Resistivity Wafer Mapping System
Four Point Probing Information
20 Short Application Note on Sheet Resistance, Ohms-Per-Square, and the Calculation of Resistivity or Thickness
21 Basic information regarding how to make four point probe measurements using Jandel resistivity test equipment.
22 Four Point Probe Theory - A helpful article
23 Four Point Probe Equations - A helpful article from the University of Illinois - Urbana/Champaign
24 Converting Ohms-per-square to Ohms-cm Converting sheet resistance measurements to values expressed as bulk resistivity
25 Sample Size Requirements and Correction Factors
Some questions and answers from Jandel Engineering Ltd.
26 Haldor Topsoe Technical Documents Regarding Correction Factors
Correction Factor for various material shapes and sizes
27 [6 MEG FILE] Natgional Bureau of Standards Technical Note 199, Issued April 15, 1964, "Correction Factor Tables for Four-Point Probe Resistivity Measurements On Thin, Circular Semiconductor Samples" [6068K PDF File - click to view on the right, or right click to save this 6 meg file]
28 Finite-Size Corrections for 4-Point Probe Measurements, by J. R. Senna, Instituto Nacional de Pesquisas Espaciais (INPE), Brasil
29 Questions and answers re: resistivity & resistance, sheet resistance, volume resistivity, surface resistivity by John Clark of Jandel Engineering
30 Q & A regarding the use of Jandel Resistivity Measurement equipment by Pete Clark of Jandel Engineering
31 Four-Point Probe Theory of Operation from the University of California, Berkeley, EECS web site (PDF file)
32 A table of suggested probe tip specifications for various silicon wafer types.
33 A table of common four point probe tip radii and spacings
34 Osmium alloy tips versus tungsten carbide tips
35 Square array versus linear array four point probe
36 Jandel FAQ
Hall Effect Measurement Technical info:
37 Wikipedia article regarding the Hall Effect
38 Wikipedia article regarding the Van der Pauw method
39 NIST web page regarding the theory and implementation of the Hall Effect Measurement technique
Four-Point-Probes is a division of Bridge Technology.
To request further information or to place an order, please call Bridge Technology at 480-988-2256 or send e-mail to Larry Bridge at: sales@bridgetec.com
Fax # is 480-452-0172
