Technical Information

1 Short Application Note on Sheet Resistance, Ohms-Per-Square, and the Calculation of Resistivity or Thickness

2 Basic information regarding how to make four point probe measurements using Jandel resistivity test equipment.

3 Four Point Probe Theory - A helpful article

4 Four Point Probe Equations - A helpful article from the      University of Illinois - Urbana/Champaign

5 Understanding volume resistivity measurements and converting between ohms-per-square (sheet resistance) and ohms-cm (volume resistivity)

6 Sample Size Requirements and Correction Factors Some questions and answers from Jandel Engineering Ltd.

7 Haldor Topsoe Technical Documents Regarding Correction Factors Correction Factor for various material shapes and sizes

8 1964 National Bureau of Standards Technical Note 199, "Correction Factor Tables for Four-Point Probe Resistivity Measurements on Thin, Circular Semiconductor Samples"

9 Finite-Size Corrections for 4-Point Probe Measurements, by J. R. Senna, Instituto Nacional de Pesquisas Espaciais (INPE), Brasil

10 Questions and answers re: resistivity & resistance, sheet resistance, volume resistivity, surface resistivity by John Clark of Jandel Engineering

11 Q & A regarding the use of Jandel Resistivity Measurement equipment by Pete Clark of Jandel Engineering

12 Four-Point Probe Theory of Operation from the University of California, Berkeley, EECS web site (PDF file)

13 A table of suggested probe tip specifications for various silicon wafer types.

14 A table of common four point probe tip radii and spacings

15 Osmium alloy tips versus tungsten carbide tips

16 Square array versus linear array four point probe

17 Reversing current to check the validity of a 4 point probe measurement

18 Determining the best choice of probe tip specifications (tip spacing, spring loads, material, radii) for a given material.

19 What is the expected life of a Jandel Four Point Probe Head?

20 Jandel FAQ

Hall Effect Measurement Technical info:

21 Wikipedia article regarding the Hall Effect

22 Wikipedia article regarding the Van der Pauw method

23 NIST web page regarding the theory and implementation of the Hall Effect Measurement technique

 

Four Point Probe Nostalgia

Four Point Probe Nostalgia

 

The probe heads and equipment manufactured by Jandel have been selling worldwide since 1967. Jandel's expertise in probe head manufacture incorporates more than 40 years of work in the watch and semiconductor industry and ten years spent working for A&M Fell in England during the 1950's to mid '60's. The first commercially available four point probe head, the "Fell" probe, was designed by Jandel's managing director, John Clark, and a colleague during that time.


This following photos show an example of a four point probe head which Jandel's managing director designed and may have built during his 10 years working at A&M Fell.

     
Click any image to see a larger photo



Click the image above to download the product brochure
[143K PDF file] for the original "Fell" Probe Head


The UK based Fell probe head manufacturing facility was purchased outright by Kulicke and Soffa in the late 1960's and now carries the K&S/Microswiss trade mark. Jandel Engineering was established in 1967. Jandel greatly improved the design and manufacturing of the original four point probe head and today produces the highest quality four point probe heads available anywhere in the world.

This is an example of an early four point probe stand manufactured by A&M Fell, produced in the time frame in which Jandel's founder built and tested such systems as an employee of A&M Fell:

Click the image to see a larger photo



Here is an example of an early four point probe stand manufactured shortly after K&S acquired A&M Fell:

Click the image to see a larger photo



The following is a 1970's era pantograph style wafer resistivity mapping system that Jandel manufactured (no longer available) that was introduced before motorized resistivity wafer mapping systems were available. :

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Jandel sells the Cartridge with Lead four point probe head as the correct replacement probe for the older Magne-Tron M700 and M800 which were equipped with the Probex or Parc Amber probe heads (Probex purchased and resold Parc Amber probes).




The following photo shows a load of non-Jandel probes heading for the dumpster. Jandel has withdrawn the offer of allowing 10 non-Jandel probes to be turned-in for one new Jandel probe, however, this was a popular practice at one time.

Click the image to see a larger photo



If you have an "antique" four point probing system, please email a photo to me and I'll be very happy to add it to our four point probe nostalgia page.

 

 

Four-Point-Probes is a division of Bridge Technology. To request further information please call Bridge Technology at (480) 988-2256 or send e-mail to Larry Bridge at: sales@bridgetec.com