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The square array four point probe has some differences to consider when compared to the much more commonly used linear array four point probe: 1) The square array probe has a smaller footprint. 2) The voltage signal for a square array probe is one half of the voltage compared to a linear array probe. The smaller footprint allows smaller samples to be measured. When probing onto wafers, the use of a square array probe allows the user to measure closer to the edge of a sample before a correction factor is required. The smaller voltage signal must be taken into account when using four point probing electronics and software that are designed to calculate sheet resistance and to read-out directly in ohms-per-square based upon the assumption that a linear array probe is being used. Jandel references these papers related to square array probes in their various instruction manuals: Small slice at centre: A. Marcus and J. J. Oberly, IEEE Trans. Electron. Devices, ED-3, 161 (1956) Small slice along a radius: L. J. Swartzendruber, National Bureau of Standards Technical Note 199 (1964) Square sample: M. G. Buehler, Solid State Electronics, 10, 801 (1967) Thick sample near boundary: S. B. Catalano, IEEE Trans. Electron. Devices, ED-10, 185 (1963) Thin infinite sheet: M. G. Buehler, Solid State Electronics, 10, 801 (1967) |
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